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Max.working Temperature(℃): 1300
Temperature Uniformity(℃）: ≤±3
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Max.Working Temp.: 1800℃
Max.Working Pressure: 9.8bar
Process Temperature((℃): 700-1050
Precursors And Process Gases: TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S
Temp.of Deposition((℃): 900-1050
Process Pressure(mbar): 100-300
Maximum Static Pressure: 1500/2100/2300℃
Dimension Of Constant Temperature Zone: Ф160x160 Mm/Ф160x200 Mm
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Workingspace: 12-1000L
Max.workingPressureMax.workingPressure(MPA): 1、2、6、10、20
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Packaging Details: wooden cases
Delivery Time: 5-6 months
Max.workign Temperature: 2400℃
Temperature Uniformity: ≤±5℃
Max.working Temperature: 2400℃
Temperature Uniformity: ≤±10℃
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Max.working Temperature: 1300℃
Operating Temperature: 1200℃
Max.working Temperature: 2500℃
Temperature Uniformity: ≤±5℃
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Max.Working Temp.: 1600℃
Working Temperature: 1550℃
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Max.working Temperature: 1800℃
Temperature Uniformity: ≤±5℃
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Working Space: 400*400*1200mm, Or Customized According To Customer Needs
Working Pressure: 60 Bar
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Max.working Temperature(℃): 1200
Temperature Uniformity(℃）: ≤±3
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Max.working Pressure(MPa): 1-10
Max.working Temperature: 2000
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